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Why does silicon nitride play an important duty in chips? Assess the advantages of silicon nitride compared to various other materials.
In chip manufacturing, there is a product that plays an important role, that is silicon nitride (SiNx). Although it may not obtain the very same attention as various other more well-known semiconductor materials such as silicon (Si), gallium arsenide (GaAs) or gallium nitride (GaN), its relevance is self-evident. A lot of chips will certainly utilize this product.
1. Why is it SiNx?
Careful friends have discovered that I made use of SiNx when composing the chemical formula of silicon nitride. Buddies who have examined secondary school chemistry should know that N is the fifth major team aspect. Realistically, the valence must be -3, while the chemical valence of silicon is +4. The chemical formula of silicon nitride need to be Si3N4. How can it be SiNx?
First, let's speak about the multivalent state of nitrogen: nitrogen has numerous valence states, generally due to the fact that it has 5 valence electrons, and nitrogen atoms can share these electrons in different means. Nitrogen can create different valence states, which mainly rely on the number of electrons it shares with various other components.
For nitrogen, its most secure valence state is -3, such as in ammonia (NH3) and gallium nitride (GaN). Nevertheless, nitrogen can also form a favorable valence state by shedding electrons, such as the +5 valence state in nitric acid (HNO3). Furthermore, nitrogen can likewise form a valence state between -3 and +5, such as the +3 valence state in nitrous acid (HNO2) or the +1 and +2 valence states in some organic substances.
Secondly, allow's speak about silicon nitride:
In the semiconductor market, silicon nitride made use of in numerous applications is commonly non-uniform, usually represented by SiNx. SiNx is an amorphous product whose properties rely on the proportion of nitrogen to silicon, that is, the value of x. When the value of x changes, the physical and chemical residential properties of silicon nitride will certainly likewise transform. Silicon nitride does can be found in many kinds, including Si3N4, Si2N2, WRONG, and so on
Si3N4 is a crystalline material, which indicates that its silicon and nitrogen ratio is taken care of. When the worth of x amounts to 4/3, SiNx is equal to Si3N4. Nevertheless, in useful applications, SiNx is typically non-uniform, and its silicon and nitrogen ratio can be regulated by transforming the criteria of the PVD or CVD procedure.
2. What is the duty of SiNx in chip production?
Silicon nitride has superb insulation residential or commercial properties, and its resistivity can be as high as 10 ^ 14 Ω · centimeters, far going beyond some typical insulating materials such as silicon oxide (SiO2). Its low dielectric continuous makes it a perfect seclusion layer in microwave and RF applications. The silicon nitride layer additionally plays a role in obstructing the diffusion of contaminations in the chip. It can avoid dopants such as boron and phosphorus from transforming device attributes through diffusion. On top of that, it can additionally prevent the diffusion of steel ions to prevent mistakes such as short circuits.
The exceptional thermal stability of silicon nitride is determined by its unique chemical properties and crystal framework. It can continue to be secure in a high-temperature setting without chemical decay or physical shape adjustments like other products. That's because in the crystal framework of silicon nitride, each silicon atom is integrated with four nitrogen atoms in the type of a tetrahedron, and each nitrogen atom is likewise integrated with four silicon atoms in the kind of a tetrahedron. This framework makes the crystal latticework of silicon nitride exceptionally secure and challenging to flaw. For that reason, it is made use of as a gate-insulating layer when making high electron movement transistors (HEMTs).
3. What are the benefits of SiNx over SiO2?
Much better thermal stability, more difficult solidity, and harder to etch.
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